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由ZKuiying著作·2010·被引用5次—Adeeptrenchisolationprocessprovidesverylowleakagecurrent,low...Accordingtotheoptimizedtrenchprocess,desirableisolationcapabilityofthedeep ...,ThetrenchisolationregionsisolateeachpairofCMOStransistorsandanylinearorhig...
Process optimization of a deep trench isolation structure for ...
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由ZKuiying著作·2010·被引用5次—Adeeptrenchisolationprocessprovidesverylowleakagecurrent,low...Accordingtotheoptimizedtrenchprocess,desirableisolationcapabilityofthedeep ...
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