sti field oxide
WithitszerooxidefieldencroachmentSTIismoresuitablefortheincreaseddensityrequirements,becauseitallowstoformsmallerisolationregions.The ...,由KShiozawa著作·1999·被引用9次—WeconcludedthatSTI,inwhichtheoriginalfieldoxideabruptlyprojectsabovethesubstr...
Shallow trench isolation process using oxide deposition ...
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Afterpatterningthesource/drainareas,afieldoxideisgrown....Forexample,conventionalSTIlineroxideprocessescanutilizetemperaturesofapproximately ...
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