deep trench isolation process
由ZKuiying著作·2010·被引用5次—Adeeptrenchisolationprocessprovidesverylowleakagecurrent,low...Accordingtotheoptimizedtrenchprocess,desirableisolationcapabilityofthedeep ...,ThetrenchisolationregionsisolateeachpairofCMOStransistorsandanylinearorhig...
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Theprocessflowforthistechnologyisbasedona.PepionP++substratestartingmaterial.AshallowtrenchisolationisemployedfortheCMOSlogicisolation ...
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