deep trench isolation process
由MForsberg著作·2004·被引用4次—Ashallowanddeeptrenchisolationprocessmoduleforhighperformancerfbipolarcomplementarymetal-oxide-semiconductor.(BiCMOS)ispresentedindetail.,由RDRung著作·1982·被引用139次—Adeep(5-6microns)trenchisolationprocesswhichper...
Deep trench isolated CMOS devices
- shallow trench isolation半導體
- shallow trench isolation半導體
- shallow trench isolation製程
- sti divot formation
- shallow trench isolation解釋
- sti etch back
- deep trench isolation
- locos
- shallow trench isolation process flow
- sti淺溝槽
- 淺溝槽絕緣sti
- locos製程
- hump effect
- hump effect
- shallow trench isolation半導体
- shallow trench isolation半導體
- 淺溝槽隔離
- 淺溝槽隔離
- 淺溝槽隔離
- shallow trench isolation中文
- sti field oxide
- shallow trench isolation半導体
- locos sti比較
- deep trench isolation
- cmos sti
由RDRung著作·1982·被引用139次—Adeep(5-6microns)trenchisolationprocesswhichpermitsminimumfeaturesizespacingbetweenn-andp-channeldevicesinbulkCMOSisdescribed.
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