sti etch back
thispaper,weintroduceamathematicalmodelforchemicalmechanicalpolishing#CMP#ofreversetoneetchbackshallowtrenchisolation#STI#structures.,6Inthiswork,amathematicalmodelforreversetoneetchbackSTICMPbasedondensityandstepheightdependentoxideandnitriderem...
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- hump effect
- shallow trench isolation解釋
- shallow trench isolation半導体
- 淺溝渠隔離
- sti淺溝槽
- sti usg
- locos sti比較
- device isolation
- shallow trench isolation半導體
- corner rounding半導體
- deep trench isolation
- sti淺溝槽
- locos sti比較
- deep trench isolation
- 淺溝渠隔離
- shallow trench isolation process flow
- shallow trench isolation oxide thickness leakage
- hump effect
- ild半導體
- 淺溝槽隔離
- sti locos
- cmos setup utility設定
- shallow trench isolation半導体
- shallow trench isolation半導体
- 淺溝槽隔離
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