![sti divot](https://host.easylife.tw/files/RiotIsolator.png)
本研究探討場發射金屬氧化半導電晶體(MOSFET)淺溝槽隔離絕緣層(ShallowTrenchIsolation,STI)與鄰近電晶體主動區的高度差(Step-height)對元件特性的影響。,STIdivotformationiseliminatedorsubstantiallyreducedbyemployingaverythinnitridepolishstoplayer,e...
THE EFFECT OF STI DIVOT ON PLANNER LOGIC ...
- 屏蔽氧化層
- sab半導體
- 淺溝槽絕緣sti
- cmos sti
- shallow trench isolation解釋
- sti divot
- shallow trench isolation解釋
- 淺溝槽絕緣sti
- shallow trench isolation中文
- deep trench isolation
- sti locos
- locos製程
- 淺溝槽隔離
- sti淺溝槽
- shallow trench isolation半導體
- shallow trench isolation解釋
- pad oxide半導體
- deep trench isolation
- sti usg
- sti divot
- sti usg
- usg半導體
- sti淺溝槽
- locos sti比較
- 屏蔽氧化層
ThispaperwilldiscusstheeffectofetchingmethodsfortheSTIdivotfeatureandtheimpactofdivotdepthontheperformanceof28mHKMGlogicdevices ...
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