![sti divot](https://host.easylife.tw/files/RiotIsolator.png)
本研究探討場發射金屬氧化半導電晶體(MOSFET)淺溝槽隔離絕緣層(ShallowTrenchIsolation,STI)與鄰近電晶體主動區的高度差(Step-height)對元件特性的影響。,STIdivotformationiseliminatedorsubstantiallyreducedbyemployingaverythinnitridepolishstoplayer,e...
Method of reducing STI divot formation during ...
- 淺溝槽隔離
- usg半導體
- 屏蔽氧化層
- 淺溝槽隔離
- pad oxide半導體
- pad oxide半導體
- sti locos
- sti divot
- shallow trench isolation中文
- sti divot
- sidewall spacer用途
- locos sti比較
- sti淺溝槽
- deep trench isolation process
- sti locos
- sti etch back
- 半導體contact via
- locos sti比較
- 淺溝槽隔離
- sti divot formation
- sti divot
- reverse narrow width effect
- sab半導體
- shallow trench isolation解釋
- pad oxide半導體
STIdivotformationiseliminatedorsubstantiallyreducedbyemployingaverythinnitridepolishstoplayer,e.g.,nothickerthan400Å.Theverythin ...
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