shallow trench isolation oxide thickness leakage
由EPerrin著作—ThispaperproposesareviewofthevariousconsequencesoftheShallowTrenchIsolation(STI)oxidethicknessvariationsondifferentprocessstepsand.,由LZhangli著作·2011·被引用5次—Gatelengthdependenceoftheshallowtrenchisolationleakagecurrentinan...ST...
Gate length dependence of the shallow trench isolation ...
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由LZhangli著作·2011·被引用5次—Gatelengthdependenceoftheshallowtrenchisolationleakagecurrentinan...STIwasintroducedandthetrenchoxidethicknessisabout390nm.Thegate ...
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