shallow trench isolation oxide thickness leakage
由EPerrin著作—ThispaperproposesareviewofthevariousconsequencesoftheShallowTrenchIsolation(STI)oxidethicknessvariationsondifferentprocessstepsand.,由LZhangli著作·2011·被引用5次—Gatelengthdependenceoftheshallowtrenchisolationleakagecurrentinan...ST...
the effect of shallow trench isolation (sti) topology, sidewall
- sti etch back
- shallow trench isolation 用途
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- shallow trench isolation oxide thickness leakage
- 淺溝槽隔離
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- shallow trench isolation半導体
- sti divot formation
- sti field oxide
由NRezzak著作·2010·被引用8次—Priortoradiationexposure,theleakagecurrentoftheparasiticdevicesislowduetotherelativelylargeeffectivegateoxidethickness(highthreshold ...
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