deep trench isolation process
由ZKuiying著作·2010·被引用5次—Adeeptrenchisolationprocessprovidesverylowleakagecurrent,low...Accordingtotheoptimizedtrenchprocess,desirableisolationcapabilityofthedeep ...,ThetrenchisolationregionsisolateeachpairofCMOStransistorsandanylinearorhig...
Deep trench isolation structures and methods of formation ...
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ThetrenchisolationregionsisolateeachpairofCMOStransistorsandanylinearorhighvoltagedevicesformedonthesubstrate.Thedeeptrenches(e.g.,for ...
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