![deep trench isolation process](https://host.easylife.tw/files/RiotIsolator.png)
由MForsberg著作·2004·被引用4次—Ashallowanddeeptrenchisolationprocessmoduleforhighperformancerfbipolarcomplementarymetal-oxide-semiconductor.(BiCMOS)ispresentedindetail.,由RDRung著作·1982·被引用139次—Adeep(5-6microns)trenchisolationprocesswhichper...
Deep trench isolation structures and methods of formation ...
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ThetrenchisolationregionsisolateeachpairofCMOStransistorsandanylinearorhighvoltagedevicesformedonthesubstrate.Thedeeptrenches(e.g.,for ...
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