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由ZKuiying著作·2010·被引用5次—Adeeptrenchisolationprocessprovidesverylowleakagecurrent,low...Accordingtotheoptimizedtrenchprocess,desirableisolationcapabilityofthedeep ...,ThetrenchisolationregionsisolateeachpairofCMOStransistorsandanylinearorhig...
Deep trench isolation structure and method of forming same
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Deeptrenchisolation(DTI)structuresandmethodsofformingthesameareprovided.Amethodincludesformingapluralityofphotosensitiveregionsina ...
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