deep trench isolation process
由ZKuiying著作·2010·被引用5次—Adeeptrenchisolationprocessprovidesverylowleakagecurrent,low...Accordingtotheoptimizedtrenchprocess,desirableisolationcapabilityofthedeep ...,ThetrenchisolationregionsisolateeachpairofCMOStransistorsandanylinearorhig...
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由ATournier著作·被引用90次—Followingthisprocessflow,DeepTrenchisolationwasintegratedina1.4µmpixelFront-Side.Illumination(FSI)technology.Cross-sectioninsidepixels ...
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