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低溫LPCVDSiGe;100至1200°C以上退火制程.LPCVD服務的市場:.MEMS·先進封裝·功率半導體·光電·半導體.AVP/RVP.TheAVP/RVPverticalbatchfurnace ...,ThisthesisanalyzestheflowandthermalfieldinaverticalLPCVDchamberwithrotatingsusceptorbyusingDSMCmethod.Itaimsat...
vertical lpcvd reactor
- LPCVD furnace system
- horizontal lpcvd型錄
- W CVD process
- Atmospheric pressure CVD
- lpcvd原理
- vertical lpcvd
- poly摻雜
- LPCVD advantages
- poly爐管
- usg半導體
- lpcvd ndl
- 半導體active area
- ndl水平爐管
- Tungsten CVD
- Plasma Enhanced chemical vapor deposition
- What is lpcvd
- Low temperature oxide
- Oxide deposition
- CVD tungsten
- Low pressure chemical vapor deposition
- lpcvd pecvd比較
- vertical lpcvd
- LPCVD SiO2
- lpcvd原理
- CVD Precursor
VERTICALLPCVDREACTOR.Inthisreactoratlowpressure,borondopedpolysiliconisdepositedondifferentsubstrates.(Si,Diamond,Glass...)usingtheLPCVD ...
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