![poly depletion metal gate](https://host.easylife.tw/pics/201212/Czech22_IronGate/IMG_2727.jpg)
Thiseffectiscalledpolysilicondepletion.Itleadstoareducedelectronconcentrationattheinterfaceandcausesaneffectiveincreaseofthedielectric ...,1)Polysilicondepletionlowersthegatecapandincreasestheeffectiveelectricalthicknessofthegateinsulator.2)Quant...
Metal gate technology for nanoscale transistors—material ...
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由YCYeo著作·2004·被引用109次—InscalingthetransistorgatelengthLGbelow50nm,problemsrelatedtopoly-silicon(poly-Si)gatedepletionandhighgateresistancebecomeverysignificant ...
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