sti divot formation
TheSiNpull-backprocessisknownforreducingdivotaroundthetopcomerinconventionalSTI.BothLOCOSandPB-STIcanresultindivotfree.Itisalso ...,2013年7月17日—IntheSTItechnique,atrenchsurroundingasemiconductordevicesuchasatransistorisetchedintoasemiconductors...
Wet Chemical Etching Behavior Investigation for CMOS ...
- shallow trench isolation oxide thickness leakage
- shallow trench isolation中文
- locos製程
- locos製程
- 淺溝槽絕緣sti
- shallow trench isolation解釋
- 淺溝槽隔離
- sti divot formation
- sti淺溝槽
- 淺溝槽絕緣sti
- deep trench isolation process
- shallow trench isolation半導體
- locos製程
- shallow trench isolation半導體
- 淺溝槽絕緣sti
- reverse narrow width effect
- locos sti比較
- shallow trench isolation半導体
- 淺溝渠隔離
- hump effect
- usg半導體
- shallow trench isolation半導体
- sti divot formation
- locos製程
- sti etch back
由HTai著作·2016·被引用1次—Shallowtrenchisolation(STI)divotshapecontrolisalwaysoneofmost...Thisstudyindicatedthatdivotformationishighlycorrelatedtoetching ...
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