sti divot formation
TheSiNpull-backprocessisknownforreducingdivotaroundthetopcomerinconventionalSTI.BothLOCOSandPB-STIcanresultindivotfree.Itisalso ...,2013年7月17日—IntheSTItechnique,atrenchsurroundingasemiconductordevicesuchasatransistorisetchedintoasemiconductors...
Method of reducing STI divot formation during ...
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- hump effect
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- 淺溝槽隔離
- sti divot formation
STIdivotformationiseliminatedorsubstantiallyreducedbyemployingaverythinnitridepolishstoplayer,e.g.,nothickerthan400Å.Theverythin ...
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