high k metal gate process
由LWu著作·2013—Thechapterfirstexplainsthedetailsofdevicesfabricationprocessandthendescribestheanalysistechniqueusedinthisproject,including ...,ElectrodeandDielectricWhenthegateispulsed,currentflowsbetweenthesourceanddrain.Intel'sHigh-K/MetalGatet...
Integrating high-k metal gates: gate-first or gate
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由TYHoffmann著作·被引用33次—SimilartoIntel's45nmprocess,thisapproachisbasedonahigh-kfirstschemethough,sounlesssignificantprogressisbeingmadetoimprovethethermal ...
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